2023 International Conference on Solid State Devices and Materials

Presentation information

Oral Presentation

02: Advanced and Emerging Memories / New Applications

[K-2] Emerging Memory Devices

Wed. Sep 6, 2023 4:00 PM - 5:30 PM Room K (234, Bldg. 2)

Session Chairs: Atsushi Himeno (Panasonic Holdings Corporation), Grenouillet Laurent (CEA-Leti)

4:45 PM - 5:00 PM

[K-2-04] Investigation of Spin-on Films as Mold Stack and Controlling Wafer Warpage for 3D Memory Integration

Soodoo Chae1, Hojin Kim1, Nayoung Bae1, Stephen Mancini2, Lior Huli1, Steven Gueci1, Dave Hetzer1, Sitaram Arkalgud1 (1. TEL Technology Center, America, LLC (United States of America), 2. College of Nanoscale Science and Engineering (United States of America))

https://doi.org/10.7567/SSDM.2023.K-2-04

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