Oxide Semiconductor Devices for Back-End-of-Line Applications

Xiao Gong

doi:https://doi.org/10.7567/SSDM.2023.K-4-01

10:45 AM - 11:15 AM

[K-4-01 (Invited)] Oxide Semiconductor Devices for Back-End-of-Line Applications

^○Xiao Gong¹ (1. National Univ. of Singapore (Singapore))

https://doi.org/10.7567/SSDM.2023.K-4-01

In this talk, I will review our recent
progress on oxide semiconductor (OS) devices for
back-end-of-line (BEOL) compatible applications,
including the realization of devices with novel
structures, the formation of OSFET based spike neuron network (SNN), and the modelling of OSFETs.

2023 International Conference on Solid State Devices and Materials

[K-4-01 (Invited)] Oxide Semiconductor Devices for Back-End-of-Line Applications