The Japan Society of Applied Physics

11:15 〜 11:45

[K-4-02 (Invited)] IGZO FET for Capacitorless DRAM Application

Xinlv Duan1, Guanhua Yang1, Ling Li1, Ming Liu1,2 (1. Inst. of Microelectronics, Chinese Academy of Sci. (China), 2. Fudan Univ. (China))

https://doi.org/10.7567/SSDM.2023.K-4-02

IGZO Capacitorless DRAM shows a great prospect in next generation DRAM technology due to long retention time and BEOL capability for stacking up, but still faces the challenges in high-density scaling limit of area per bit-cell and random read error when integrating large array. Here, towards high-density application, we demonstrate vertical Channel-all-around IGZO FETs based DRAM with 4F2 bit-cell area and long retention time over 300 seconds. Towards reliable read operation, we demonstrate ultra-scaled dual-gate IGZO FETs based DRAM by using one gate to control read and another for storage, achieving reliable gate-controlled read scheme with efficient electrical performance.