The Japan Society of Applied Physics

2:00 PM - 2:30 PM

[M-1-01 (Invited)] Effect of Basal Plane Dislocation Structure on 1SSF Expansion Rate in 4H-SiC

Johji Nishio1, Chiharu Ota1, Ryosuke Iijima1 (1. Corporate R&D Center, Toshiba Corp. (Japan))

https://doi.org/10.7567/SSDM.2023.M-1-01

The expansion rate of single Shockley-type stacking faults was examined under ultraviolet illumination according to various basal plane dislocation structures with 90º or 30º Si-core partial dislocations. An attempt was made to explain the difference in expansion rate of 30º Si-core partial dislocations according to whether the basal plane dislocation structure was accompanied by unexpandable C-core partial dislocations. Moreover, the expansion rate of 90º Si-core partial dislocations was obtained experimentally and compared with that of 30º partial dislocations.