[M-2] Advanced Materials, Nanofabrication, and Thin Films I

[M-2-02] Growth of High-Performance Single-Crystalline MoS ₂ on Sapphire Substrates Using an Industrial Reactor for Next-Generation Electronics

^○Henry Medina Silva¹, Yuanyuan Shi^1,2, Benjamin Groven¹, Sreetama Banerjee¹, Ankit Nalin Mehta¹, Iryna Kandybka¹, Akane Inoue¹, Joris Verdin¹, Pawan Kumar¹, Quentin Smets¹, Souvik Ghosh¹, Daire Cott¹, Stefanie Sergeant¹, Dries Vranckx¹, Sebastiaan Nijs¹, Rudy Verheyen¹, Tom Schram¹, Marco Claudio Torres Macario¹, Raf Rennen¹, Felix De Groef¹, Steven Brems¹, Pierre Morin¹, Cesar Javier Lockhart de la Rosa¹, Inge Asselberghs¹, Gouri Sankar Kar¹ (1. IMEC (Belgium), 2. Univ. of Sci. and Tech. of China (China))

https://doi.org/10.7567/SSDM.2023.M-2-02