2023 International Conference on Solid State Devices and Materials

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Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[M-7] Advanced Materials, Nanofabrication, and Thin Films III

Fri. Sep 8, 2023 1:30 PM - 3:15 PM Room M (431, Bldg. 4)

Session Chairs: Akihiko Kikuchi (Sophia Univ.), Kentaro Watanabe (Shinshu Univ.)

1:30 PM - 1:45 PM

[M-7-01] Theoretical Study of the Gas-Phase Reaction of Hexachlorodisilane by Thermodynamic Analysis and Kinetics Calculation

○Tomoya Nagahashi1,2, Hajime Karasawa2, Ryota Horiike2, Kenji Shiraishi1,3 (1. Nagoya Univ. (Japan), 2. KOKUSAI ELECTRIC (Japan), 3. IMaSS (Japan))

https://doi.org/10.7567/SSDM.2023.M-7-01

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