The Japan Society of Applied Physics

09:00 〜 09:30

[N-3-01 (Invited)] Feasibility Study of InP-based Tera-Hertz-ICs Fabrication Process for Beyond 5G / 6G Wireless Network Systems

Takuya Tsutsumi1, Hiroki Sugiyama, Hiroshi Hamada, Teruo Jyo, Yuta Shiratori, Takuya Hoshi, HIroyuki Takahashi, Fumito Nakajima, (1. NTT Device Tech. Lab. (Japan))

https://doi.org/10.7567/SSDM.2023.N-3-01

Next-generation Beyond 5G (B5G) / 6G wireless network systems are currently the subject of intensive research and development to keep up with the rapid growth of mobile traffic. We report a high-yield fabrication process of InP-based transistors and Tera-Hertz monolithic ICs (THz-ICs) with 300-GHz operation, which is one of the candidate frequencies for Beyond 5G / 6G network systems. We also introduce InP-THz-ICs (300-GHz power amplifiers and mixers) and demonstrate that they are suitable candidates for B5G/6G.