2023 International Conference on Solid State Devices and Materials

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Poster Session

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-1] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-1-01] Amorphous Si-rich Mo silicide films for advanced source/drain contacts

○Naoya Okada1, Noriyuki Uchida1, Toshihiko Kanayama1 (1. AIST (Japan))

https://doi.org/10.7567/SSDM.2023.PS-1-01

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