2023 International Conference on Solid State Devices and Materials

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Poster Session

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-1] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-1-06] Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

○Heng- Jia Chang1, Yi-Ju Yao2, Ching-Ru Yang1, Ting-Yu Tseng1, Tsai-Jung Lin2, Guang-Li Luo3, Fu-Ju Hou3, Yung-Chun Wu1 (1. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 2. College of Semiconductor Research, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-1-06

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