Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

Heng- Jia Chang

doi:https://doi.org/10.7567/SSDM.2023.PS-1-06

[PS-1-06] Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

^○Heng- Jia Chang¹, Yi-Ju Yao², Ching-Ru Yang¹, Ting-Yu Tseng¹, Tsai-Jung Lin², Guang-Li Luo³, Fu-Ju Hou³, Yung-Chun Wu¹ (1. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 2. College of Semiconductor Research, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-1-06

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講演情報

[PS-1] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-1-06] Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

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