Impact of Post-growth Slow-cooling Process on the Growth of Rocksalt-structured MgZnO Films by Mist CVD

Kotaro Ogawa

doi:https://doi.org/10.7567/SSDM.2023.PS-10-10

[PS-10-10] Impact of Post-growth Slow-cooling Process on the Growth of Rocksalt-structured MgZnO Films by Mist CVD

^○Kotaro Ogawa¹, Wataru Kosaka¹, Hiroya Kusaka¹, Yuichi Ota², Tomohiro Yamaguchi¹, Tohru Honda¹, Kentaro Kaneko³, Shizuo Fujita⁴, Takeyoshi Onuma¹ (1. Kogakuin Univ. (Japan), 2. Tokyo Metropolitan Industrial Technology Research Inst. (Japan), 3. Ritsumeikan Univ. (Japan), 4. Kyoto Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-10-10

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講演情報

[PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[PS-10-10] Impact of Post-growth Slow-cooling Process on the Growth of Rocksalt-structured MgZnO Films by Mist CVD

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