Three-dimensional structure of threading screw dislocation at deep location in 4H-SiC using step-scanning X-ray section topography

Kotaro Ishiji

doi:https://doi.org/10.7567/SSDM.2023.PS-11-01

[PS-11-01] Three-dimensional structure of threading screw dislocation at deep location in 4H-SiC using step-scanning X-ray section topography

^○Kotaro Ishiji¹, Akio Yoneyama^1,2, Masayuki Inaba³, Kazunori Fukuda⁴, Atsushi Sakaki⁵, Shinya Ohmagari⁶, Ryuichi Sugie⁷ (1. Kyushu Synchro. Light Res. Center (Japan), 2. Res. Dev. Group, Hitachi, Ltd. (Japan), 3. Nissan ARC, Ltd. (Japan), 4. Kobelco Res. Inst., Inc. (Japan), 5. Nichia Corp. (Japan), 6. National Inst. Adv. Indus. Sci. Tech. (Japan), 7. Toray Res. Center, Inc. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-11-01

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講演情報

[PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[PS-11-01] Three-dimensional structure of threading screw dislocation at deep location in 4H-SiC using step-scanning X-ray section topography

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