2023 International Conference on Solid State Devices and Materials

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Poster Session

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-11-15] Formation of Ultra-thin Nickel Silicide on SiO2 Using a-Si/Ni/a-Si Structures for Oxidation Control

○Keisuke Kimura1, Noriyuki Taoka2, Akio Ohta3, Katsunori Makihara1, Seiichi Miyazaki1 (1. Nagoya Univ. (Japan), 2. Aichi Inst. of Tec. (Japan), 3. Fukuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-11-15

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