Enhanced Ferroelectricity of HfZrO<sub>x</sub>-based Ferroelectric Capacitors by Quenching with Liquid Nitrogen

Chun-I Kuo

doi:https://doi.org/10.7567/SSDM.2023.PS-2-02

[PS-2-02 (Late News)] Enhanced Ferroelectricity of HfZrO_x-based Ferroelectric Capacitors by Quenching with Liquid Nitrogen

^○Chun-I Kuo¹, Kai-Sheun Lee¹, Yi-Fan Chen¹, Yung-Hsien Wu¹ (1. Department of Engineering and System Science National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-2-02

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講演情報

[PS-2] 02: Advanced and Emerging Memories / New Applications

[PS-2-02 (Late News)] Enhanced Ferroelectricity of HfZrO_x-based Ferroelectric Capacitors by Quenching with Liquid Nitrogen

パスワード

講演情報

[PS-2] 02: Advanced and Emerging Memories / New Applications

[PS-2-02 (Late News)] Enhanced Ferroelectricity of HfZrOx-based Ferroelectric Capacitors by Quenching with Liquid Nitrogen

パスワード

[PS-2-02 (Late News)] Enhanced Ferroelectricity of HfZrO_x-based Ferroelectric Capacitors by Quenching with Liquid Nitrogen