2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Poster Session

02: Advanced and Emerging Memories / New Applications

[PS-2] 02: Advanced and Emerging Memories / New Applications

2023年9月7日(木) 15:00 〜 17:00 Shirotori Hall (Nagoya Congress Center)

[PS-2-11] Influence of H2 in Reactive Sputtering of Ferroelectric AlScN Films

○Si- Meng Chen1, Sung-Lin Tsai1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1 (1. Tokyo Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-2-11

Abstract password authentication.
A password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

パスワード