2023 International Conference on Solid State Devices and Materials

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Poster Session

02: Advanced and Emerging Memories / New Applications

[PS-2] 02: Advanced and Emerging Memories / New Applications

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-2-11] Influence of H2 in Reactive Sputtering of Ferroelectric AlScN Films

○Si- Meng Chen1, Sung-Lin Tsai1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1 (1. Tokyo Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-2-11

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