2023 International Conference on Solid State Devices and Materials

Presentation information

Poster Session

03: Interconnect / 3D Integrations / MEMS

[PS-3] 03: Interconnect / 3D Integrations / MEMS

Thu. Sep 7, 2023 3:00 PM - 5:00 PM Shirotori Hall (Nagoya Congress Center)

[PS-3-02] Using a CMOS MEMS Resonator System for Rapid Calibration of Thin Film Deposition Thickness

Cheng-Yang Chang1, Chin-Te Hsin1, Ying-Zong Juang1, Sheng-Hsiang Tseng1 (1. National Applied Research Laboratories Taiwan Semiconductor Research Institute (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-3-02

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