2023 International Conference on Solid State Devices and Materials

講演情報

Poster Session

03: Interconnect / 3D Integrations / MEMS

[PS-3] 03: Interconnect / 3D Integrations / MEMS

2023年9月7日(木) 15:00 〜 17:00 Shirotori Hall (Nagoya Congress Center)

[PS-3-03] On the Study of ESD-Induced Electromigration in CMOS Metallization

Yang-Shou Hou1, Chun-Yu Lin1 (1. National Taiwan Normal Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2023.PS-3-03

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