AlN Stressor for Near-infrared Ge-on-Si Photonic Devices

Jose Alberto Piedra-Lorenzana

doi:https://doi.org/10.7567/SSDM.2023.PS-5-05

[PS-5-05] AlN Stressor for Near-infrared Ge-on-Si Photonic Devices

^○Jose Alberto Piedra-Lorenzana¹, Shohei Kaneko¹, Takaaki Fukushima¹, Takeshi Hizawa¹, Keisuke Yamane¹, Junichi Fujikata², Yasuhiko Ishikawa¹ (1. Toyohashi Univ. of Tech. (Japan), 2. Tokushima Univ. (Japan))

https://doi.org/10.7567/SSDM.2023.PS-5-05

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講演情報

[PS-5] 05: Photonics: Devices / Integration / Related Technology

[PS-5-05] AlN Stressor for Near-infrared Ge-on-Si Photonic Devices

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