2023 International Conference on Solid State Devices and Materials

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Short Course

[SC-A] Short Course A
Leading-edge CMOS Technology for 2nm-node and beyond

Tue. Sep 5, 2023 1:00 PM - 5:45 PM Room F (224, Bldg. 2)

Organizer: Meishoku Masahara (AIST)
Chair: Toshifumi Irisawa (AIST)

3:30 PM - 4:15 PM

[SC-A-04] Fundamental Insights into Advanced Processes of 3D Integration

〇Fumihiro Inoue1 (1. Yokohama National Univ.)

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