2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Course

[SC-A] Short Course A
Leading-edge CMOS Technology for 2nm-node and beyond

2023年9月5日(火) 13:00 〜 17:45 Room F (224, Bldg. 2)

Organizer: Meishoku Masahara (AIST)
Chair: Toshifumi Irisawa (AIST)

15:30 〜 16:15

[SC-A-04] Fundamental Insights into Advanced Processes of 3D Integration

〇Fumihiro Inoue1 (1. Yokohama National Univ.)

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