2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Course

[SC-B] Short Course B
Plasma technology: Cornerstone of the post-scaling and next milestone of assurance energy and environment

2023年9月5日(火) 13:00 〜 17:00 Room K (234, Bldg. 2)

Organizer: Kenji Ishikawa (Nagoya Univ.)
Chair: Masanori Terahara (Western Digital)

13:45 〜 14:30

[SC-B-02] Sustainable CMOS Scaling in Nanosheet Era

〇Naoto Horiguchi1 (1. imec)

To download the text, click on "Text Download (PDF)".

User name for Text Download: ssdm2023ShortCourse
Password for Text Download: Has been provided in a separate mail.
Text Download (PDF)

Abstract password authentication.
A password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

パスワード