2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Course

[SC-B] Short Course B
Plasma technology: Cornerstone of the post-scaling and next milestone of assurance energy and environment

2023年9月5日(火) 13:00 〜 17:00 Room K (234, Bldg. 2)

Organizer: Kenji Ishikawa (Nagoya Univ.)
Chair: Masanori Terahara (Western Digital)

15:30 〜 16:15

[SC-B-04] Technological direction of high aspect ratio etching for memory devices

〇Akihiro Tsuji1 (1. Tokyo Electron Ltd.)

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