2023 International Conference on Solid State Devices and Materials

Presentation information

Print

Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 1:30 PM - 2:00 PM Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

1:40 PM - 1:42 PM

[SO-PS-01-06] Investigation of SiGe/Si Super Lattice GAAFET and CMOS Inverter

○Heng- Jia Chang1, Yi-Ju Yao2, Ching-Ru Yang1, Ting-Yu Tseng1, Tsai-Jung Lin2, Guang-Li Luo3, Fu-Ju Hou3, Yung-Chun Wu1 (1. Department of Engineering and System Science, National Tsing Hua University (Taiwan), 2. College of Semiconductor Research, National Tsing Hua University (Taiwan), 3. Taiwan Semiconductor Research Institute (Taiwan))

Abstract password authentication.
PA password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

Password