2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[SO-PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

Thu. Sep 7, 2023 1:30 PM - 2:00 PM Room F (224, Bldg. 2)

Session Chairs: Hidetoshi Oishi (Sony Semiconductor Solutions Corp.), Keisuke Yamamoto (Kyushu Univ)

1:54 PM - 1:56 PM

[SO-PS-01-13] Vertical Gate-All-Around SiGeSn/GeSn/SiGeSn Nanowire nFETs

Yannik Junk1, Omar Concepción Diaz1, Marvin Frauenrath2,3, Florian Bärwolf4, Andreas Mai4, Jean-Michel Hartmann2,3, Detlev Grützmacher1, Dan Buca1, ○Qing-Tai Zhao1 (1. Peter-Grünberg-Institut (PGI-9) and JARA-FIT, Forschungszentrum Jülich (Germany), 2. CEA-LETI, MINATEC Campus, F-38054 Grenoble (France), 3. Univ. of Grenoble Alps (France), 4. IHP-Leibniz-Institut für innovative Mikroelektronik, 15236 Frankfurt (Oder) (Germany))

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