2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

02: Advanced and Emerging Memories / New Applications

[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

Thu. Sep 7, 2023 1:30 PM - 2:18 PM Room K (234, Bldg. 2)

Session Chairs: Atsushi Himeno (Panasonic Holdings Corporation), Ming-Hsiu Lee (Macronix International Co., Ltd)

1:50 PM - 1:52 PM

[SO-PS-02-11] Influence of H2 in Reactive Sputtering of Ferroelectric AlScN Films

○Si- Meng Chen1, Sung-Lin Tsai1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1 (1. Tokyo Inst. of Tech. (Japan))

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