2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Oral Presentation

02: Advanced and Emerging Memories / New Applications

[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

2023年9月7日(木) 13:30 〜 14:18 Room K (234, Bldg. 2)

Session Chairs: Atsushi Himeno (Panasonic Holdings Corporation), Ming-Hsiu Lee (Macronix International Co., Ltd)

13:50 〜 13:52

[SO-PS-02-11] Influence of H2 in Reactive Sputtering of Ferroelectric AlScN Films

○Si- Meng Chen1, Sung-Lin Tsai1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui1, Kuniyuki Kakushima1 (1. Tokyo Inst. of Tech. (Japan))

Abstract password authentication.
A password is required to view abstracts. You can find the password in the "Advance Program".The "Advance Program" is handed out at the registration desk to registered participants.

パスワード