2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

08: Low Dimensional Devices and Materials

[SO-PS-08] 08: Low Dimensional Devices and Materials

2023年9月7日(木) 13:30 〜 13:56 Room A (131+132, Bldg. 1)

Session Chair: Shu Nakaharai (Tokyo Univ. of Technology)

13:52 〜 13:54

[SO-PS-08-12] Investigation of Top-gate MoS2 FETs by Low-temperature ALD High-κ and Hydrazine Passivated Interface

○Min- Kun Huang1, Hsu-Tang Liao2, William Cheng-Yu Ma2, Yeong-Her Wang1, Chun-Jung Su3,4 (1. National Cheng Kung Univ. (Taiwan), 2. National Sun Yat-sen Univ. (Taiwan), 3. National Yang Ming Chiao Tung Univ. (Taiwan), 4. Taiwan Semiconductor Research Inst. (Taiwan))

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