2023 International Conference on Solid State Devices and Materials

Presentation information

Short Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

Thu. Sep 7, 2023 1:30 PM - 1:50 PM Room E (223, Bldg. 2)

Session Chairs: Kaoru Toko (Univ. of Tsukuba), Ryo Matsumura (NIMS)

1:36 PM - 1:38 PM

[SO-PS-10-04] Effect of Bilayer High-kAl2O3 and HfO2 Gate Insulators on the Electrical Performance of Amorphous Oxide Thin-Film Transistors

Dian Budiarti Kastian1, Juan Paolo Bermundo1, Yukiharu Uraoka1 (1. Nara Inst. of Sci. and Tech. (Japan))

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