2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Oral Presentation

10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

[SO-PS-10] 10: Thin Film Electronics: Oxide / Non‐single Crystalline / Novel Process

2023年9月7日(木) 13:30 〜 13:50 Room E (223, Bldg. 2)

Session Chairs: Kaoru Toko (Univ. of Tsukuba), Ryo Matsumura (NIMS)

13:48 〜 13:50

[SO-PS-10-10] Impact of Post-growth Slow-cooling Process on the Growth of Rocksalt-structured MgZnO Films by Mist CVD

○Kotaro Ogawa1, Wataru Kosaka1, Hiroya Kusaka1, Yuichi Ota2, Tomohiro Yamaguchi1, Tohru Honda1, Kentaro Kaneko3, Shizuo Fujita4, Takeyoshi Onuma1 (1. Kogakuin Univ. (Japan), 2. Tokyo Metropolitan Industrial Technology Research Inst. (Japan), 3. Ritsumeikan Univ. (Japan), 4. Kyoto Univ. (Japan))

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