2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 1:30 PM - 2:10 PM Room M (431, Bldg. 4)

Session Chairs: Shingo Ogawa (Toray Research Center, Inc.), Taizoh Sadoh (Kyushu Univ.)

1:30 PM - 1:32 PM

[SO-PS-11-01] Three-dimensional structure of threading screw dislocation at deep location in 4H-SiC using step-scanning X-ray section topography

○Kotaro Ishiji1, Akio Yoneyama1,2, Masayuki Inaba3, Kazunori Fukuda4, Atsushi Sakaki5, Shinya Ohmagari6, Ryuichi Sugie7 (1. Kyushu Synchro. Light Res. Center (Japan), 2. Res. Dev. Group, Hitachi, Ltd. (Japan), 3. Nissan ARC, Ltd. (Japan), 4. Kobelco Res. Inst., Inc. (Japan), 5. Nichia Corp. (Japan), 6. National Inst. Adv. Indus. Sci. Tech. (Japan), 7. Toray Res. Center, Inc. (Japan))

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