2023 International Conference on Solid State Devices and Materials

講演情報

印刷

Short Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

2023年9月7日(木) 13:30 〜 14:10 Room M (431, Bldg. 4)

Session Chairs: Shingo Ogawa (Toray Research Center, Inc.), Taizoh Sadoh (Kyushu Univ.)

13:42 〜 13:44

[SO-PS-11-07] Formation of Micron-Thick Ge by Trench-Filling Epitaxy Using a Patterned (001) Si Substrate with a <100>-Oriented Trench Array

○Takumi Maeda1, Kota Kato1, Jose A. Piedra-Lorenzana1, Takeshi Hizawa1, Tetsuya Nakai2, Yasuhiko Ishikawa1 (1. Toyohashi Univ. of Tech. (Japan), 2. SUMCO Corp. (Japan))

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