2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 1:30 PM - 2:10 PM Room M (431, Bldg. 4)

Session Chairs: Shingo Ogawa (Toray Research Center, Inc.), Taizoh Sadoh (Kyushu Univ.)

1:46 PM - 1:48 PM

[SO-PS-11-09] Ultra-High Concentration Doping by Excimer Laser Annealing Using Solid-Diffusion Source

○Ren Aoki1, Keita Katayama1, Daisuke Nakamura1, Hisato Yabuta1, Hiroshi Ikenoue1, Taizoh Sadoh1 (1. Kyushu Univ. (Japan))

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