2023 International Conference on Solid State Devices and Materials

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Short Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 1:30 PM - 2:10 PM Room M (431, Bldg. 4)

Session Chairs: Shingo Ogawa (Toray Research Center, Inc.), Taizoh Sadoh (Kyushu Univ.)

1:58 PM - 2:00 PM

[SO-PS-11-15] Formation of Ultra-thin Nickel Silicide on SiO2 Using a-Si/Ni/a-Si Structures for Oxidation Control

○Keisuke Kimura1, Noriyuki Taoka2, Akio Ohta3, Katsunori Makihara1, Seiichi Miyazaki1 (1. Nagoya Univ. (Japan), 2. Aichi Inst. of Tec. (Japan), 3. Fukuoka Univ. (Japan))

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