The Effect of V/III Ratio on the Morphology and Structure of the Homo-epitaxial GaN Growth on Bulk GaN Substrates by Radical Enhanced Metal-Organic Chemical Vapor Deposition (REMOCVD)

ARUN KUMAR DHASIYAN

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Short Oral Presentation

11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

Thu. Sep 7, 2023 1:30 PM - 2:10 PM Room M (431, Bldg. 4)

Session Chairs: Shingo Ogawa (Toray Research Center, Inc.), Taizoh Sadoh (Kyushu Univ.)

2:06 PM - 2:08 PM

[SO-PS-11-19 (Late News)] The Effect of V/III Ratio on the Morphology and Structure of the Homo-epitaxial GaN Growth on Bulk GaN Substrates by Radical Enhanced Metal-Organic Chemical Vapor Deposition (REMOCVD)

^○ARUN KUMAR DHASIYAN¹, Swathy Jayaprasad¹, Frank Wilson Amalraj¹, Naohiro Shimizu¹, Osamu Oda¹, Kenji Ishikawa ¹, Masaru Hori¹ (1. Center for Low-temperature Plasma Sciences, Nagoya University (Japan))

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Presentation information

[SO-PS-11] 11: Advanced Materials: Synthesis / Crystal Growth / Characterization

[SO-PS-11-19 (Late News)] The Effect of V/III Ratio on the Morphology and Structure of the Homo-epitaxial GaN Growth on Bulk GaN Substrates by Radical Enhanced Metal-Organic Chemical Vapor Deposition (REMOCVD)

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