2023 International Conference on Solid State Devices and Materials

Presentation information

Tutorial

[TUS] Si-based Technology: Past, Present, and Future

Tue. Sep 5, 2023 10:00 AM - 12:00 PM Room D+E (222+223, Bldg.2)

Organizer: Katsunori Makihara (Nagoya Univ.)

10:00 AM - 11:00 AM

[TUS-01] Device scaling: from geometrical scaling via new materials to 3D sequential stacking

〇Roger Loo1 (1. imec)

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