International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

09:00 〜 09:25

[AMD5-1(Invited)] Switching Characteristic Enhancement of P-type Cu2O TFTs

Dongwoo Kim1, I Sak Lee1, Sujin Jung1, Sung Min Rho1, *Hyun Jae Kim1 (1. Yonsei University (Korea))

Oxide TFT, p-type semiconductor, Copper oxide

https://doi.org/10.36463/idw.2019.0451

We propose three methods to enhance switching characteristics of p-type Cu2O thin film transistors (TFTs) by passivating the copper oxide TFTs with silicon dioxide (SiO2) using sputtering, oxidizing the back channel of copper oxide with hypochlorous acid (HClO), and doping gallium into the Cu2O film.