9:50 AM - 10:10 AM

[AMD5-3] High Mobility Oxide TFT Based on In-rich In-Ga-Sn-O Semiconductors with Nanocrystalline Structures

*XUERU MEI², HUAFEI XIE¹, NIAN LIU², MACAI LU², Lei Wen², Shujhih Chen², Shengdong Zhang², Chiayu Lee², Xin Zhang² (1. Peking University (China), 2. Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd (China))

In-Rich In-Ga-Sn-O, Top-Gate Self-Aligned (TGSA), Nanocrystalline Structure, High Mobility

https://doi.org/10.36463/idw.2019.0458