1:20 PM - 1:45 PM
[AMD7-1(Invited)] Nanostructured IGZO thin-film transistors with remarkably enhanced current density and on-off ratio
Thin-film transistor, oxide semiconductor, nanostructures
We develop oxide TFTs with nanoscale and periodic degenerately doped heterostructures by using a strategy based on near-field nanolithography. These nanostructured TFTs remarkably enhanced in current density, compared with homogeneous IGZO TFTs. The on–off ratio was higher than 109, with notably scaling effect with channel length.