International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

13:20 〜 13:45

[AMD7-1(Invited)] Nanostructured IGZO thin-film transistors with remarkably enhanced current density and on-off ratio

Kairong Huang1, *Chuan Liu1 (1. Sun Yat-sen University (China))

Thin-film transistor, oxide semiconductor, nanostructures

https://doi.org/10.36463/idw.2019.0479

We develop oxide TFTs with nanoscale and periodic degenerately doped heterostructures by using a strategy based on near-field nanolithography. These nanostructured TFTs remarkably enhanced in current density, compared with homogeneous IGZO TFTs. The on–off ratio was higher than 109, with notably scaling effect with channel length.