17:30 〜 17:50
[FLX1/FMC3-2] Al alloying effect in functionalization of mechanical resistance to foldable display interconnections
Al alloys, bending resistance, intermetallic compounds
For the metal interconnection in foldable displays, bending resistance is essential in addition to heat resistance and low electrical resistivity. The bending resistance of Al-Nd alloy interconnections can be controlled by precipitation of intermetallic compounds. Then, the Al alloy interconnections capable of dry-ething patterning have also been developed.