International Display Workshops General Incorporated Association

17:30 〜 17:50

[FLX1/FMC3-2] Al alloying effect in functionalization of mechanical resistance to foldable display interconnections

*Chiharu Kura1, Mototaka Ochi1, Hiroyuki Okuno2, Hiroshi Goto2 (1. Kobe Steel, LTD. (Japan), 2. Kobelco Research Institute, Inc. (Japan))

Al alloys, bending resistance, intermetallic compounds

https://doi.org/10.36463/idw.2019.1562

For the metal interconnection in foldable displays, bending resistance is essential in addition to heat resistance and low electrical resistivity. The bending resistance of Al-Nd alloy interconnections can be controlled by precipitation of intermetallic compounds. Then, the Al alloy interconnections capable of dry-ething patterning have also been developed.