International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

18:10 〜 18:30

[FLX2-3] Study on Top-Gate Self-Aligned InGaZnO TFTs on PI Substrate

*Nian Liu1, Huafei Xie2, Macai Lu1, Xueru Mei1, Lei Wen1, Shujhih Chen1, Shengdong Zhang2, Chiayu Lee1, Xin Zhang1 (1. Shenzhen China Star Optoelectronics Semiconductor Display Technology Co.Ltd., China (China), 2. School of Electronic and Computer Engineering, Peking University, Shenzhen, China (China))

IGZO, Flexible Display, Polyimide, Thin-Film Transistor, Micro LED

https://doi.org/10.36463/idw.2019.1582

We discussed the effect of polyimide substrate on TFTs, the water from polyimide diffused into IGZO which deteriorated device characteristic. By reducing hydrogen content in GI we optimized device characteristic, and GI 1step deposition is more stable. Finally, we did the static bending and dynamic test, TFTs keep good stability.