4:00 PM - 4:20 PM
[FMC2-3] Researches of Process Reduction for Viewing Angle Controllable LCD
mask reduction, half-tone mask, product process, LCD
In this paper, a better condition is found to maintain the thickness of PR for half-tone technology, and some issues of process reduction in B-ITO and M3 layers are solved. These issues of topology for M3 after ashing and last wet etching are still being studied.