International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

16:00 〜 16:20

[FMC2-3] Researches of Process Reduction for Viewing Angle Controllable LCD

*Shih-Bin Liu1, Lujie Wang1, Jun Jiang1, Yanbing Qiao1, Chia-Te Liao1, Te-Chen Chung1 (1. InfoVision Optoelectronics (Kunshan) Co., Ltd. (China))

mask reduction, half-tone mask, product process, LCD

https://doi.org/10.36463/idw.2019.0635

In this paper, a better condition is found to maintain the thickness of PR for half-tone technology, and some issues of process reduction in B-ITO and M3 layers are solved. These issues of topology for M3 after ashing and last wet etching are still being studied.