9:40 AM - 10:00 AM

[FMC4/LCT4-3(Invited)] Monolithic Integration of GaN-micro-LED and Si-MOSFET for Bio-application

*Hiroto Sekiguchi^1,2, Hiroki Yasunaga¹, Kazuaki Tsuchiyama¹, Keisuke Yamane¹, Hiroshi Okada¹, Akihiro Wakahara¹ (1. Toyohashi University of Technology (Japan), 2. PRESTO, JST (Japan))

MicroLED, Optogenetics, GaN, wafer bonding

https://doi.org/10.36463/idw.2019.0649