International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

09:40 〜 10:00

[FMC4/LCT4-3(Invited)] Monolithic Integration of GaN-micro-LED and Si-MOSFET for Bio-application

*Hiroto Sekiguchi1,2, Hiroki Yasunaga1, Kazuaki Tsuchiyama1, Keisuke Yamane1, Hiroshi Okada1, Akihiro Wakahara1 (1. Toyohashi University of Technology (Japan), 2. PRESTO, JST (Japan))

MicroLED, Optogenetics, GaN, wafer bonding

https://doi.org/10.36463/idw.2019.0649

A micro light-emitting diodes (LED) has been attention as an optical stimulation tool for optogenetics. In this study, a needle-type microLED probe was fabricated for neuroscience. In addition, the monolithic integration of microLED and Si-MOSFET using wafer bonding technique was challenged toward the realization of multifunctional devices.