15:40 〜 16:00
[FMC8-3] Capacitance-Voltage Characteristics of Solution-Based HfZr-Silicate Gate Dielectrics Capacitance-Voltage Characteristics of Solution-Based HfZr-Silicate Gate Dielectrics
*Nara Lee1, Pyungho Choi1, Byoungdeog Choi1
(1. Sungkunkwan University (Korea))