International Display Workshops General Incorporated Association

2:30 PM - 5:00 PM

[FMCp5-6L] Transparent Conductive Ga-Al-ZnO Film Fabricated by Facing Targets Sputtering System

*Kyung Hwan Kim1, Yu Jin Kim1, You Seung Rim2, Jeongsoo Hong1 (1. Gachon University (Korea), 2. Sejong University (Korea))

FTS, GAZO, Trnasparent electrode

Ga and Al doped ZnO thin films were fabricated by facing targets sputtering system with various deposition conditions including input current, oxygen atmosphere and thermal treatment temperature. In this study, we investigated the change of electrical, optical and structural properties by fabrication conditions.