International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 26 (IDW '19)

Proceedings of the International Display Workshops Volume 26 (IDW '19)

2019年11月27日 〜 2019年11月29日
Sapporo Convention Center

14:30 〜 17:00

[FMCp5-6L] Transparent Conductive Ga-Al-ZnO Film Fabricated by Facing Targets Sputtering System

*Kyung Hwan Kim1, Yu Jin Kim1, You Seung Rim2, Jeongsoo Hong1 (1. Gachon University (Korea), 2. Sejong University (Korea))

FTS, GAZO, Trnasparent electrode

Ga and Al doped ZnO thin films were fabricated by facing targets sputtering system with various deposition conditions including input current, oxygen atmosphere and thermal treatment temperature. In this study, we investigated the change of electrical, optical and structural properties by fabrication conditions.